New Piezo Motor Linear Slide from Physik Instrumente Ideal for MEMS Applications

Published on April 30, 2008 at 10:19 AM

PI’s patented P-653 piezo motor linear slide is significantly smaller than other miniature linear stages and provides significantly higher velocities and resolution. This true linear motor system (no conversion of rotation) consists of only 4 parts and can replace classical drive elements like miniaturized motor/lead screw systems or other linear motors, which P-653 outclasses with its speed of up to 200 mm/sec (8”/sec) and auto-locking feature.

P-653 piezo motor linear slide

Measuring only 8.0mm in length, the new P-653 stage offers a travel range of 2mm and sub-micron resolution, combined with a high holding force of 0.15 N (0.5 oz) -- state-of-the-art figures for a stage of these minute dimensions.

Easy Integration

Integration of the P-653 in an application is simple because the moving slider and the piezo motor are delivered assembled as a unit and already mounted on a PCB driver board requiring only 5 VDC supply voltage.

Typical Applications

P-653-series PILine® piezoelectric ultrasonic motor drives are ideal for OEM applications where quantities are high and space is at a premium. The systems were optimized for moving small objects such as optical fibers, micro-optics, or micro-electro-mechanical elements fast and precisely. These non-magnetic ceramic motors (no lubricants!) can also be used in medical applications.

Features & Advantages of the Ceramic Miniature Motors

n      True Linear Motor Slide / No Rotary Conversion Losses
n      Fast: Velocity up to 200 mm/s, Millisecond Responsiveness
n      Self Locking; Smaller, Faster, Fewer Components than Conventional Motors
n      Travel Range 2 mm, Force Generation to 0.15 N
n      Cost-Effective OEM Drive for High Quantity-Applications
n      Preassembled and Mounted on a PCB Board
n      Very Compact: Piezomotor Drive is Only 8 mm Long

Simple Control

Motion is controlled by TTL voltage pulses applied to the driver electronics.  The self adjusting driver creates the high-frequency, nanometer level oscillations (~500 kHz) that make the ultrasonic ceramic motor move.

Working Principle of PILine® Piezo Ceramic Linear Motors

PILine® linear piezomotors are based on a, patented ultrasonic drive. At the heart of the system is a rectangular monolithic piezoceramic plate (the stator), segmented on one side by two electrodes. Depending on the desired direction of motion, the left or right electrode of the piezoceramic plate is excited to produce high-frequency eigenmode oscillations of hundreds of kilohertz. PILine® motors are vacuum compatible, non-magnetic and self-locking.

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