the leading provider of innovative solutions based on MEMS (micro-electro-mechanical
systems) technology, announced today it has stepped into the Nanoworld by offerring
a breakthrough Nano-plaftorm with its MUMPs® manufacturing and prototyping
Based on MUMPs® proven manufacturing techniques, the new Nano MUMPs®
platform will create submicron features on MUMPs® polysilicon wafers. This
represents a breakthrough technology as it is the first time such a manufacturing
and prototyping service is offered on the nanoscale (below 1µ) for mechanical
Taking place alongside the existing others runs (Poly MUMPs®, SOI MUMPs®,
Metal MUMPs®) , Nano MUMPs® will immediately benefit from the over 16
years experience of MUMPs® and its track-record of success that led to more
than half a million MEMS devices shipped to over 1000 customers. The expertise
gained with other runs will also enable to keep the same process length, allocate
more space for devices on each run, give customers the possibility to compare
the advantages of micro and nano processes before going to volume manufacture,
and mostly, offer customers the most cost-effective manufacturing and prototyping
services for nanomachines.
The applications for this new process are endless, from mirors to fuel cells,
through fluidics, renewable energies, accelerometers and medical/biomedical
MUMPs® is the ultimate platform for proof-of-concept fabrication. The longest
running and most renowned multi-user program for MEMS and now NANO technologies,
manufacturing in the world, MUMPs® uses standard yet diversified process
technologies that serve universities, laboratories, companies and researchers.
Its versatile possibilities adapt to endless features, devices, and applications.
The service’s low cost allows researchers with the smallest budgets to
realize their ideas.