Nova Measuring Instruments Ltd. is a leading global semiconductor equipment
manufacturer with solutions and services that are used by 21 of the largest
25 IC manufacturers. Nova's expertise in Thin Film and Optical CD & shape
profiling metrology systems are addressing the complex measurement and process
control challenges of High Volume Production (HVM) in 300 & 200 mm IC manufacturing,
from 90nm to the demanding 45nm and 32nm technology nodes.
The company's systems utilize a combination of Spectroscopic Reflectrometry
and Scatterometry to measure CD, trench depth, photoresist height, thickness
and shape of complex layer stacks, as well as a variety of other features and
parameters guaranteeing the delivery of tight wafer-to-wafer and within-wafer
control. Nova offers Integrated Metrology (IM) and Stand-alone (SA) metrology
product lines addressing different metrology needs. These hardware products
are complemented by advanced structure modeling and application development
software empowering fab engineers with the automation and flexibility necessary
to develop in-fab 2D/3D and in-die applications for high-end semiconductor devices.