Evactron® 25Z Zephyr De-Contaminator from XEI Scientific for Vacuum Chamber Cleaning

The Evactron® 25Z Zephyr De-Contaminator from XEI Scientific is a user-friendly tabletop model capable of eliminating atmospheric carbon and hydrocarbons contamination from vacuum chambers such as focused ion beams and scanning electron microscopes.

The compact, remote plasma cleaning device produces gas-phase radicals using remote RF plasma. The generated radicals remove contamination from the vacuum chamber while passing through it.

The Evactron® 25Z Zephyr is designed for chambers using turbomolecular pumps (TMPs), eliminating contamination in the turbo pressure regime at 1-50mTorr without causing harmful effects on the TMP temperatures.

Key Features

The following are the key features of the Evactron® 25Z Zephyr De-Contaminator™:

  • One button operation
  • RF power of 5-20W
  • Clean chambers at turbopump pressures
  • ≥10x improved cleaning rate
  • Operating pressure of 1-50mTorr
  • Safe decontamination of the chamber with no damage to sensitive parts
  • The turbo-molecular pump is stress-free
  • Reduced cleaning time lowers downtime and improves productivity
  • Improved mean free path, yet ion damage-free
  • Chamber cleaning while in "pump down"

Other Equipment by this Supplier

Azthena logo

AZoM.com powered by Azthena AI

Your AI Assistant finding answers from trusted AZoM content

Your AI Powered Scientific Assistant

Hi, I'm Azthena, you can trust me to find commercial scientific answers from AZoNetwork.com.

A few things you need to know before we start. Please read and accept to continue.

  • Use of “Azthena” is subject to the terms and conditions of use as set out by OpenAI.
  • Content provided on any AZoNetwork sites are subject to the site Terms & Conditions and Privacy Policy.
  • Large Language Models can make mistakes. Consider checking important information.

Great. Ask your question.

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.