The HLD117 Linear Stage – Smooth Motion and High Precision at Speed of up to 300mm per second

Prior Scientific’s HLD117 stages use linear motor technology to provide high accuracy, smooth movement with remarkably low velocity ripple, and speeds between 0.1 µm/s and 300 mm/s.

A large flat top provides an unrestricted working area, and allows other equipment, such as vertical positioning systems, to be added. The stage features 50 nm encoders as standard. Sample holders to accommodate metallurgical samples, slides, semiconductor wafers and other specimen types are also available.

Key Features

  • Linear orientation
  • Smooth movement
  • Travel range: 120 x 80 mm
  • Speed: 300 mm/s
  • Precision: 0.045 µm
  • Repeatability: 0.15 µm
  • Resolution: 0.05 µm

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