Spectroscopic Ellipsometers

Spectroscopic ellipsometry is a sensitive, non-destructive and non-intrusive process commonly used to determine thin-film thickness and optical constants of modern semiconductors.

Spectroscopic ellipsometers reliably and accurately determine the real and the imaginary parts of the optical dielectric constant as a function of wavelength for semiconductors, metals and other thin-film materials. Ellipsometers can also determine depth-profiles with nearly atomic resolution; the composition for any sample layers; the microroughness of the sample exterior; and the near-surface temperature of samples.

Spectroscopic ellipsometry is great for a variety of thin film applications from fields like biotechnology, semiconductors, solar and surface chemistry.