New, More Powerful Analysis Software for Thin Films from HORIBA Scientific

HORIBA Scientific, the leading manufacturer of spectroscopic ellipsometers for research and industry, offers an advanced thin film characterization platform called DeltaPsi2. The software applies to ellipsometry, polarimetry and reflectometry and controls all HORIBA Scientific thin film metrology instruments.

DeltaPsi2 software provides advanced measurements, modelling and reporting capabilities for accurate and flexible characterization of thin film structures.

Features include calculation of thicknesses, optical constants, gradients, anisotropy, alloy composition, bandgap calculation, surface roughness, EMA, backside corrections, multi combined measurements/analysis data and more.

It integrates the largest materials database of references and dispersion relations required for accurate characterization of material optical constants.

Recent enhancements were focussed on automatic modelling operations including automatic fitting procedures and parameterization of dispersion relations for ease of use and speed of analysis. It also incorporates the latest advances in the characterization of periodic structures (1D, 2D gratings).

Fab ellipsometers such as the UT-300 and FF-1000, and in-line ellipsometers (for example roll to roll monitoring instruments) are also driven by the DeltaPsi2 software platform. The software includes a fully automatic operating environment and advanced communication protocols (RS232, TCP/IP) for robust thin film metrology control. DeltaPsi2 software provides standardized visualization of mapping results on semiconductor wafer and glass panels, statistical analysis, advanced data manipulation, import/export package function, and reprocessing capabilities.

Recently, HORIBA Scientific launched the new Auto SE, a fully automatic ellipsometer for quality control of thin films. Driven by the new Auto Soft software package included in the DeltaPsi2 platform, this new innovative software has been designed to provide easy operations of ellipsometric analysis with no compromise on data quality.

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