Carl Zeiss, a leading global
provider of electron- and ion-beam imaging and analysis solutions, today presents
its newly developed line of corrected LIBRA 200 transmission electron microscopes
(TEM).
Aberration free high resolution imaging of a YAG crystal interface at 200 kV. [Courtesy of Katharina Hartmann, GFZ German Research Center for Geoscienes, Potsdam.]
The LIBRA 200 CS TEM is based on the energy-filter version of the 200kV LIBRA
TEM with a corrector for spherical aberrations of the objective lens. By use
of this corrector, image resolution below 0.7 Angstrom can be achieved. Many
applications will benefit from this development, e.g. imaging of interfaces
in semiconductors or solar cells, grain boundaries in steel alloys or damage
induced by nuclear radiation in shielding materials. In all these application
fields the control of the material at the atomic scale is necessary for in-depth
understanding of the underlying physical or chemical processes and to guarantee
the functionality of the devices. Another advantage based on the CS corrector
is the ability to reduce the acceleration voltage down to 80kV and still achieve
resolutions below one Angstrom. Beam damage can thus be reduced and sensitive
materials like carbon nanotubes can be analyzed.
The LIBRA 200 STEM with a corrector for the condenser system is used for imaging
in the scanning mode with a resolution far below one Angstrom and extreme high
resolution chemical analysis of samples, especially by means of electron energy
loss spectroscopy (EELS). The corrected condenser allows minimizing the probe
size below one Angstrom, and at the same time increases intensity. Additionally
the unique monochromator reduces the energy spread down to 0.15 eV. Basic research
in materials science (e.g. chemical analysis of nano-particles) especially will
benefit from the resulting energy resolution that otherwise can only be reached
at synchrotron rings.
“We have already started installation of several systems at customer
sites in leading research facilities worldwide. Here resolution of 0.66 Angstrom
could be demonstrated. Customer feedback is extremely positive,” explains
Thomas Albrecht, Head of Product Management at Carl Zeiss SMT´s Nano Technology
Systems division. “We do have a lot of experience with corrected transmission
electron microscopes from customer specific installations like the CRISP system
at the Caesar—Center for Advanced European Studies and Research in Bonn.
Now we are using this experience to broadly offer this superb technology to
the market. This strategy is in-line with our mission “Maximum Information—Maximum
Insight.”
Correctors are developed and produced by the Heidelberg-based company CEOS
GmbH, a specialist for electron optical correctors and a long-term partner for
Carl Zeiss.