SINANO, Suzhou Institute of Nanotech and Nano-bionics of Chinese Academy of
Science, China, recently received their new AIXTRON
Black Magic CNT tool. It was delivered in a 2 inch wafer configuration in the
second quarter of 2009.
Prof. Qingwen Li, from SINANO comments: “Installation and commissioning
of the AIXTRON Black Magic system went smoothly and already we have carried
out some experiments in both LPCVD and PECVD modes. We used our own catalysts
and achieved vertically aligned carbon nanotube arrays with typical growth rates
of 60 microns per minute. Using PECVD, a perfectly straight CNT array film could
be obtained. SEM images of the two samples synthesized by the two modes showed
highly acceptable and reproducible results.
We now aim to prepare ultralong CNT arrays with controllable structures for
nanocomposites and patterned CNT arrays for device fabrication,” says
Prof. Qingwen Li. “The vertical showerhead-based growth reactor, fast
heating stage and rapid sample turnaround features have been the crucial factors
for our purchasing decision. As to our initial conclusions on the new system,
everything has performed as expected. It is very easy to use with a user-friendly
interface. In addition, the in-situ monitoring of the growth process is a significant
advantage”.