SINANO Receives AIXTRON Black Magic CNT Tool for Experiments in LPCVD and PECVD Modes

Published on October 27, 2009 at 4:14 AM

SINANO, Suzhou Institute of Nanotech and Nano-bionics of Chinese Academy of Science, China, recently received their new AIXTRON Black Magic CNT tool. It was delivered in a 2 inch wafer configuration in the second quarter of 2009.

Prof. Qingwen Li, from SINANO comments: “Installation and commissioning of the AIXTRON Black Magic system went smoothly and already we have carried out some experiments in both LPCVD and PECVD modes. We used our own catalysts and achieved vertically aligned carbon nanotube arrays with typical growth rates of 60 microns per minute. Using PECVD, a perfectly straight CNT array film could be obtained. SEM images of the two samples synthesized by the two modes showed highly acceptable and reproducible results.

We now aim to prepare ultralong CNT arrays with controllable structures for nanocomposites and patterned CNT arrays for device fabrication,” says Prof. Qingwen Li. “The vertical showerhead-based growth reactor, fast heating stage and rapid sample turnaround features have been the crucial factors for our purchasing decision. As to our initial conclusions on the new system, everything has performed as expected. It is very easy to use with a user-friendly interface. In addition, the in-situ monitoring of the growth process is a significant advantage”.

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