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AIXTRON Receives New Order for Black Magic PECVD System from DTU Danchip and DTU Nanotech

Published on November 9, 2010 at 4:28 AM

AIXTRON AG today announced a new order for a Black Magic Plasma Enhanced CVD (PECVD) system from DTU Danchip and DTU Nanotech at the Technical University of Denmark in Lyngby, Denmark.

The institution placed the order for a 4-inch configuration deposition system during the second quarter of 2010. Following delivery in the current quarter, it will be used for the growth of graphene and carbon nanotubes for a number of different applications, such as cell-microchip interfaces, lab-on-chip filters and other microfluidic components, transducers and electrodes. Several research groups covering physics, chemistry, lab-on-chip and life-science subjects will use the new system.

Associate professor Peter Bøggild from DTU Nanotech comments, “We wanted a turnkey solution for graphene and carbon nanotubes. In our evaluation, the Black Magic system was indeed very mature and capable of large-scale, homogeneous production of these carbon nanomaterials in a reproducible manner. Since one of our main objectives is research for practical applications, reproducibility, reliability and scalability in addition to material quality are vital. Based on recommendations from trusted researchers and personal experience, we have no doubt that the AIXTRON system will live up to our high expectations. In fact, we have a long line of users ready to use the Black Magic system.”

Peter Bøggild received his Ph.D. degree at Copenhagen University in 1998 and is head of the Nanointegration research group at the DTU. He received the prestigious Danish award ‘AEG Elektronprisen 2009’ for his pioneering work on nano-tweezers and actuators, and has worked with carbon nanomaterial for many years.

The Danchip cleanroom contains a comprehensive selection of state-of-the-art process equipment for lithography, etching, thermal processing, thin film deposition, packaging and characterisation, which are professionally maintained. The facilities are used by various customers and partners comprising academic institutions, SME’s* and larger companies who require access to or services within micro- and nano-fabrication of devices. The Black Magic system will enable the integration of graphene and carbon nanotubes with existing fabrication technology to spearhead research into practical applications of carbon nanomaterials.

DTU Danchip is the National Center for Micro- and Nanofabrication in Denmark and part of the Technical University of Denmark and has recently been certified after the DS / EN ISO 9001:2008 standard after having successfully completed a certification audit by the Norwegian Veritas.

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