AIXTRON AG today announced
a new order for a Black Magic Plasma Enhanced CVD (PECVD) system from Graphenea
SL, a start-up company based within the facilities of nanoGUNE in San Sebastian
city, in the Basque region of Spain. Graphenea’s focus is in developing
graphene-based process technology for electronic devices.
Graphenea placed the order for a 4-inch wafer configuration deposition system
during the third quarter of 2010. System delivery will be in the current month,
followed by the installation and commissioning of the system by AIXTRON’s
European support team.
Graphenea’s Scientific Director, Dr Amaia Zurutuza, comments: “At
this stage in our research we need a dedicated CVD deposition system in order
to test new graphene production recipes. We need equipment with scalable process
technology and AIXTRON´s Black Magic was top of our list.
The Black Magic system is a turnkey solution for CVD deposition. High temperature
operation, combined with excellent uniformity, are key characteristics for the
purpose of our research. System flexibility, automatic recipe execution and
process support were other compelling reasons for choosing AIXTRON.”
Graphenea was established recently as a joint venture of private investors
and the Nanoscience Cooperative Research Centre, nanoGUNE Consolider. ‘nanoGUNE’
is an interdisciplinary research centre dedicated to the pursuit of scientific
excellence in four main strategic areas, namely low dimensional nanostructures,
synthesis/fabrication of nanomaterials, molecular/spin/magnetic/photonic nano
devices and nanobiotechnology.