Oxford
Instruments is pleased to announce a substantial multi-system order from
the newly built King Abdullah University of Science and Technology (KAUST) in
Saudi Arabia. This large order comprises multiple plasma etch, deposition and
growth systems.
These tools will equip the Nanofabrication Core research facility, and include
key Oxford Instruments Plasma Technology (OIPT) systems including several PlasmalabSystem100
tools for RIE and ICP etch, and PECVD; and a FlexAL atomic layer deposition
tool.
Oxford Instruments has extensive experience in supplying multi-system installations
to both the academic and industrial sectors, a key recent example being Southampton
University, UK where OIPT has recently installed a number of its tools in its
new cleanroom research facility.
Dr. Mohamed Samaha, VP Research Development at KAUST, comments, "This
equipment is for our Nanofabrication Core Lab, and comprises tools for nano-material
fabrication incorporating etching, deposition and growth. These will make our
core labs among the most advanced in the world. Researchers at KAUST will be
able to utilize these tools in the clean room for the manufacture of nano-materials
to advance the research agenda at KAUST."
Mark Vosloo, Sales Director for OIPT is delighted with the order, "This
significant order from a major Middle Eastern facility with a strong commitment
to nanofabrication research is clearly excellent business for OIPT. We are confident
this is the start of a long relationship, and are delighted to be involved at
the inception of KAUST University."