Magma Design Automation has released the Excalibur-Litho, a total fab testing framework supporting the design, supervision and process control of latest lithography products.
This is the first ever system to effectively incorporate both the layout and instantaneous data like imperfection, metrology and tool history, from the production base.
Excalibur-Litho includes built-in features for lithography criterion via fab-wide data correlation, electrical cross mapping and coupling of design-based binning. These aspects support imperfection removal and root cause investigation.
Ankush Oberai, General Manager and Vice President of Magma's Fab Analysis Business Unit, has stated that their Excalibur-Litho offers extensive assessment of inline lithography-based imperfections. He mentioned that the system uses an innovative infrastructure that can access both layout and fab information. He added that the received data is converted to knowledge, thereby quickening the process enhancement based on lithography.
On February 28 2011, Magma and Applied Materials declared a joint effort to combine Magma’s CAD-based navigation and output investigation software featuring Excalibur-Litho, with Applied Materials’ innovative inspection tools like the Applied UVision 4 system. According to Erez Paran, Manager of Integrated Solutions for Applied Materials' Process Diagnostics and Control Business Unit, the novel integration of layout and production tools has augmented the lithography criterion. He added that it has also enabled faster output ramp at multiple clients for creating innovative technology nodes.
After gathering and arranging information from the production process, wafer data is piled and effortlessly cross-mapped to any of the designs, schematic or netlist design depictions for quicker investigation. Excalibur-Litho is developed in an innovative open-architecture database, enabling secure access to CAD and simple fab incorporation. It also assures inter-functionality with analysis tools and output investigation databases.
Source: http://www.magma-da.com