Novellus Systems declared that it has supplied a VECTOR plasma-enhanced chemical vapor deposition (PECVD) system to a China-based company, Xurui Guangdian (China SemiLEDs).
Xurui Guangdian is a JV firm in which SemiLEDs, a LED manufacturer, is a partner. The VECTOR system will be deployed at the SemiLEDs' plant in China for production of MvpLED high-efficiency LED products.
Two key factors that bring LED technology into the mainstream lighting market include cost-per-lumen and cost-per-die. The existing LED manufacturing technology is mainly dependent on sapphire substrates in numerous diameters such as 2", 3" and 4". The low-productivity manufacturing technique used for LEDs takes up a lot of power. On an average, over 200 kWh or power is utilized in manufacturing a sapphire wafer of 2".
The VECTOR system delivers advanced process performance, high productivity, a wide process window and a mixture of factors which offer reduced production cost per-die when compared to conventional LED manufacturing processes.
The VECTOR LED system can manage all wafer sizes, including 2", 3", 4", 6", 8" and 12" with excellent film quality, throughput, and uniformity. Unlike a conventional PECVD reactor employed in LED production, the VECTOR LED is more energy-efficient, capable of depositing films at low temperatures and delivers superior manufacturing process control.
Source: http://www.novellus.com/