Posted in | Nanofabrication

Micronova Nanofabrication Choose Vistec Electron-Beam Lithography System

Published on March 26, 2012 at 7:58 PM

Vistec Lithography Inc. announced today that Micronova Nanofabrication Centre has selected one of its electron-beam lithography systems. The leading nanotechnology laboratory in Finland aims to use Vistec's EBPG5000plusES for the design, development and fabrication of micro- and nanosystems.

The cutting edge technology is specialized for multi-user environments and is therefore a future-proof match to the needs of Micronova.

Vistec's EBPG5000plusES electron-beam lithography system.

At Micronova more than 360 employees and students of different facilities carry out research in diverse fields of nanotechnology. The Finnish institute aims to use the system for research in the fields of nanoelectronics, nanofabrication, microelectronics, nanophotonics and microfabrication. "This state-of-the-art electron-beam lithography system gives us the possibility to continue future-proof research at the very highest level. But not only the characteristics of the system determined our decision also the long term experience of Vistec in this field of research were decisive", comments Dr. Veli-Matti Airaksinen, director of Aalto Nanofab at Micronova, the acquisition of the new system.

The Vistec EBPG5000pES is a high-performance lithography tool based on reliable and well-proven system architecture. The system is equipped for true 100kV / 1mm performance under regular electron-optical conditions with a wide capability for high throughput applications. Rainer Schmid, General Manager Vistec Lithography, Inc., explains further characteristics: "Its electron-optical column, rated for acceleration voltages of 50 and 100kV, enables the EBPG5000pES to provide a spot size down to <2.2nm. On the other hand nano-lithography structures smaller than 8nm can easily be generated."

Furthermore the system incorporates an interactive graphical user interface (GUI). "With this feature we enable the use for diverse, multiuser environments such as used at huge research institutes like Micronova or universities."

"Micronova is one of the most scientific nano-research institutes in Europe.
Therefore we are glad to have come to this agreement", comments Schmid the order. By providing a steady growing number of advanced research institutes and universities with electron-beam lithography systems Vistec has demonstrated that its technology is state-of-the-art and best choice.

"Vistec is known for its great support to its customers. But not only do our customers benefit from the cooperation, we do it as well. Having such a strong connection to cutting edge research institutes like Micronova enables us to continue the development of our technology to the demands of an even wider target group."

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