Major Foundry Acquires Mattson’s Helios XP Systems for 2Xnm Production

Published on June 21, 2013 at 5:56 AM

Mattson Technology Inc., a leading supplier of advanced process equipment used for the manufacture of semiconductors, today announced that it has shipped multiple systems of its Helios® XP rapid thermal processing (RTP) system for use in mass production at a major foundry. The systems will support the foundry's 2Xnm capacity ramp by offering leading temperature control for reliable device manufacturing coupled with a low cost of ownership (CoO).

"Our customer decided to select the Helios XP systems to ramp their manufacturing capacity based on device results meeting their stringent requirements. These results were achieved on our most advanced RTP platform equipped with leading temperature measurement and control capabilities," said Johannes Keppler, Vice President and General Manager of Mattson Technology's Thermal Products Group. "After intensive qualification in R&D facilities and verification of the systems capabilities though pilot production, we are now entering the high volume production stage and are supporting multi-system orders to this foundry."

Keppler added; "these shipments into a leading manufacturing fab continue to solidify our foundry position and prove our RTP system's capabilities in high volume production. We are looking forward to enabling our customers to manufacture at these advanced technology nodes and to help them continuously improve the performance of their devices."

About Mattson Technology, Inc.
Mattson Technology, Inc. designs, manufactures and markets semiconductor wafer processing equipment used in the fabrication of integrated circuits. We are a leading supplier of plasma and rapid thermal processing equipment to the global semiconductor industry, and operate in three primary product sectors: Dry Strip, Rapid Thermal Processing and Etch. Through manufacturing and design innovation, we have produced technologically advanced systems that provide productive and cost-effective solutions for customers fabricating current- and next-generation semiconductor devices. For more information, please contact Mattson Technology, Inc., 47131 Bayside Parkway, Fremont, CA, 94538. Telephone: (800) MATTSON / (510) 657-5900. Internet: www.mattson.com.

Source: http://www.mattson.com/

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