Jul 12 2007
Nanometrics Incorporated, a leading supplier of advanced metrology equipment to the semiconductor industry, today announced it has received a multi-platform order from a major Japanese flash memory manufacturer. The order, a complete process control solution, will include Nanometrics’ integrated metrology (IM), Atlas SE (spectroscopic ellipsometer) and proprietary NanoNet interconnectivity products. The metrology package will be used in one of the world’s largest 300 mm wafer fabrication facilities located in Japan.
The order reflects Nanometrics’ unique ability to provide customers with an extensive metrology solution, accelerating time-to-yield in high-volume manufacturing environments. The combination of IM, the Atlas SE system for film characterization, and NanoNet software for overall metrology network interconnectivity will provide both increased process control and seamless recipe development and deployment.
“This multi-platform order substantiates that our metrology strategies are providing the enhanced process control capabilities needed in the most advanced fabs,” said Nathan Coe, Nanometrics’ vice president of global sales. “Our comprehensive process control solutions give our customers a wide range of capabilities that goes unmatched in the industry and will greatly enhance the production of the leading-edge flash memory devices at this facility.”
"The customer's hands-on experience with our integrated metrology systems in current mass production fabs was a major factor in winning this business. They recognized the added value in areas of enhanced process tool control, productivity gains, and fab-wide metrology interconnectivity, concluding this was a capability necessary for the next major fab project," added Steve Bradley, Nanometrics’ integrated metrology product manager.