Using the ZMI™ Series for OEM Applications

ZYGO® is a leader in technology and application support in heterodyne displacement interferometry. The company offers comprehensive solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. For a number of years the OEM products and technologies of the company have been field-proven in leading edge production facilities.

Key Features

The key features of the ZMI™ series are as follows:

  • Heterodyne displacement interferometry
  • Highly robust for OEM applications
  • Easy to align, highly stable, and insensitive to signal amplitude changes
  • A single laser source capable of supporting multiple axes
  • High signal-to-noise phase measurements enable high precision and remove false counts, even at zero slew rates

Typical Applications

The typical applications of the ZMI™ series are as follows:

  • Calibration: Measurement and calibration of high resolution or high frequency mechanical motions
  • Process equipment: probers, memory repair tools, drilling tools, and die bonders
  • Metrology tools: Wafer, mask, and LCD measurement and inspection tools, and CD-SEMs
  • Lithography tools: e-beam and laser mask writers, scanners, and optical steppers

Configure the system to suit specific needs:

ZYGO® offers a range of

  • Laser heads
  • Measurement electronics
  • Interferometers and optics
  • Cables and feedthroughs

This modular technique enables users to configure a system that best suits their needs by selecting the most suitable components.

Other Equipment by this Supplier

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