ZYGO® is a leader in technology and application support in heterodyne displacement interferometry. The company offers comprehensive solutions and support for OEM metrology application with its ZMI™ Series Displacement Measuring Interferometers. For a number of years the OEM products and technologies of the company have been field-proven in leading edge production facilities.
Key Features
The key features of the ZMI™ series are as follows:
- Heterodyne displacement interferometry
- Highly robust for OEM applications
- Easy to align, highly stable, and insensitive to signal amplitude changes
- A single laser source capable of supporting multiple axes
- High signal-to-noise phase measurements enable high precision and remove false counts, even at zero slew rates
Typical Applications
The typical applications of the ZMI™ series are as follows:
- Calibration: Measurement and calibration of high resolution or high frequency mechanical motions
- Process equipment: probers, memory repair tools, drilling tools, and die bonders
- Metrology tools: Wafer, mask, and LCD measurement and inspection tools, and CD-SEMs
- Lithography tools: e-beam and laser mask writers, scanners, and optical steppers
Configure the system to suit specific needs:
ZYGO® offers a range of
- Laser heads
- Measurement electronics
- Interferometers and optics
- Cables and feedthroughs
This modular technique enables users to configure a system that best suits their needs by selecting the most suitable components.