Verifire™ XL: Downward-Looking Interferometer

A turnkey interferometer workstation with a large aperture and a compact footprint, the Verifire XL makes it simple to test plano optics up to 300 mm in diameter.

With its heavy-duty tip/tilt stage and user-friendly design, this fully integrated system offers reproducible part placement without needing custom fixturing.

The small footprint, with built-in vibration isolation and a controller monitor station, requires less production floor area.

More Info

This large aperture workstation is self-contained for measuring plano optical surfaces up to 12 inches (300 mm) in diameter, such as mirrors, windows, semiconductor wafers, wafer chucks, and blocked flats.

Verifire™ XL: Downward-Looking Interferometer

Image Credit: Zygo Corporation

Key Features

  • 12” (300 mm) downward-facing aperture for simple part handling and positioning
  • Interferometer mainframe, passive vibration isolation system, test part alignment stage, and 1/15th wave PVr transmission flat (TF) are all included in a turnkey, self-contained system
  • The small footprint conserves valuable floor space
  • Integrated vibration isolation and QPSI technology for reliable measurements in manufacturing environments

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