A turnkey interferometer workstation with a large aperture and a compact footprint, the Verifire XL makes it simple to test plano optics up to 300 mm in diameter.
With its heavy-duty tip/tilt stage and user-friendly design, this fully integrated system offers reproducible part placement without needing custom fixturing.
The small footprint, with built-in vibration isolation and a controller monitor station, requires less production floor area.
This large aperture workstation is self-contained for measuring plano optical surfaces up to 12 inches (300 mm) in diameter, such as mirrors, windows, semiconductor wafers, wafer chucks, and blocked flats.
Image Credit: Zygo Corporation
- 12” (300 mm) downward-facing aperture for simple part handling and positioning
- Interferometer mainframe, passive vibration isolation system, test part alignment stage, and 1/15th wave PVr transmission flat (TF) are all included in a turnkey, self-contained system
- The small footprint conserves valuable floor space
- Integrated vibration isolation and QPSI™ technology for reliable measurements in manufacturing environments