Posted in | Micropositioning Systems

系列LSMA - 175 - XYZ紧凑型电动多轴系统IntelLiDrives

集成多轴XYZ LSMA - 175系列电动执行器内置的系统提供行程可达200毫米。无刷或步进电机驱动，这个机动的阶段提供高分辨率的0.1微米的一个精密研磨滚珠丝杠。执行器作为它的主要特点，并连同其高分辨率低调紧凑和单片集成电路设计，高稳定性，使得其在高精度测量和制造系统的集成的理想设备。

规格

旅行面积达200 × 200 × 200毫米
分辨率0.1微米
载重量8公斤
直线度5微米

Last Update: 4. October 2011 21:29

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