Micropositioning Systems

Micropositioning systems are motor-driven stages with travel ranges of a few millimeters up to a few hundred millimeters. Their resolution and repeatability are typically limited to 0.1 µm due to the frictional forces generated by the guiding systems.
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Equipment
IntelLiDrives Cartesian Planar system offers the unique capability to operate two axes of motion in one plane with one motor. These systems designed to replace conventional compounded XY tables where one axis is being carried by another. As a result, with the planar systems greater reliability and performance is realized through design simplification and elimination of wear-prone components.
The Multi-Axis Positioning System is designed to allow direct coupling between the load and the drive motors. This feature eliminates backlash, allows for fast acceleration / deceleration, high speed operation while increasing the reliability. These systems are available with linear stepping or linear three phase brushless motors.
The design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. Planar ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery
The Voice Coil Stage is used in positioning applications where high speed and high accuracy are required. The stage may be used in the following industries; Semiconductor, Disk Drive, Automotive, Medical, Industrial, Optical, Test and Manufacturing. The non-commuted motor construction increases reliability. The direct coupling of the motor to the stage allows for fast acceleration / deceleration and high speed operation. The Voice Coil Stages do not need commutation and using a position sensor, positioning resolutions of less than one micron or 0.00004 inches are achievable.
Specifically designed for researchers utilizing deconvolution and 3D imaging, the NanoScanZ offers two size options the 100µm and 200µm, designed for 35mm petri dishes and standard slides or the 250µm and 500µm travel models for well plates/microtitre plates and larger samples.
The Linear Three Phase Brushless Motor Driven Positioning System is used in positioning applications where high speed and high accuracy are required. The stage may be used in the following industries; Semiconductor, Disk Drive, Automotive, Medical, Industrial, Optical, Test and Manufacturing. The direct coupling of the motor to the stage allows for fast acceleration / deceleration and high speed operation.
The RTHM-100 compact rotation stages are designed to rotate optical components and small tooling in confined spaces, such as laser cavities, disk texturing machines or manufacturing areas for fiber optical components and semiconductor devices.
The PI M-272 high-speed ultrasonic linear drives offer an economical alternative to motor-lead screw combinations and electromagnetic linear motors when small dimensions and/or high speed are crucial. With velocities of up to 200 mm/s, these drives are rapid, compact, and are easily integrated. Furthermore, PILine motors are self-locking when at rest with zero heat generation, and there is no need for an additional motor brake.
Integrated multi-axes XYZ systems built with LSMA-175 Series motorized actuators provide travel up to 200 mm. Driven by a brushless or stepper motor with a precision ground ball screw this motorized stages offers high-resolution up to 0.1 micron. Actuator has low profile high-stability compact and monolithic design as its main feature and together with its high resolution makes the device ideal for its integration in high precision measurement and manufacturing systems.
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