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Micropositioning systems are motor-driven stages with travel ranges of a few millimeters up to a few hundred millimeters. Their resolution and repeatability are typically limited to 0.1 µm due to the frictional forces generated by the guiding systems.
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Equipment
IntelLiDrives Cartesian Planar system offers the unique capability to operate two axes of motion in one plane with one motor. These systems designed to replace conventional compounded XY tables where one axis is being carried by another. As a result, with the planar systems greater reliability and performance is realized through design simplification and elimination of wear-prone components.
The M-850K hexapod precision positioner is suitable for outdoor operation and astronomy.
The H-845 features a parallel kinematic design with six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables as well as reduced friction and higher reliability. It includes a large clear aperture and brushless DC motors with brakes.
The M-122 palm-top-sized translation stage integrates small dimensions, high speeds and very high accuracy at a competitive price. It features a space-saving, folded drive train with the servo motor and drive screw side-by-side.
With a single SpaceFAB SF-3000 BS all six degrees of freedom can be moved without further positioning elements.
The M-116 rotation stages are equipped with low-friction, spring-preloaded worm gear drives enabling unlimited rotation in either direction in an extremely compact package. Both stepper and servo motor drive options provide an economical solution for industrial and OEM environments.
The MCS XY Stage was developed for microscopy and inspection applications. The travel range will be produced in 3 sizes, namely 102 x 102mm (4”), 205 x 205 mm (8”) und 305 x 305 mm (12”).
The elevation stage ES-100 is comparable with the LS-110 and PRS-110 stages. A precision ground re-circulating ball screw with 1 mm pitch drives the elevation stage.
The Multi-Axis Positioning System is designed to allow direct coupling between the load and the drive motors. This feature eliminates backlash, allows for fast acceleration / deceleration, high speed operation while increasing the reliability. These systems are available with linear stepping or linear three phase brushless motors.
The PI M-272 high-speed ultrasonic linear drives offer an economical alternative to motor-lead screw combinations and electromagnetic linear motors when small dimensions and/or high speed are crucial. With velocities of up to 200 mm/s, these drives are rapid, compact, and are easily integrated. Furthermore, PILine motors are self-locking when at rest with zero heat generation, and there is no need for an additional motor brake.
Zaber's A-LSQ-E series devices are computer-controlled, motorized linear stages comprising integrated stepper motors, controllers, and feedback encoders. The built-in encoder allows closed-loop operation and slip/stall recovery characteristics.
The U-628 from Physik Instrumente features an integrated optical encoder for direct metrology. It has an unlimited rotation range, a reference point switch and a central clear aperture with 7 mm diameter.
The linear stages of the series LS-110 are particularly suited for industrial laser treatment. Linear guides with re-circulating linear ball bearings guarantee very high guiding stiffness.
The large aperture having a diameter of 120 mm is particularly significant for the rotation stages PRS-200. The body is fabricated from a high-rigidity, special, tempered aluminum alloy.
The goniometer stages WT-90 and WT-120 are developed for all tasks where conventional rotation stages cannot be used due to limited space conditions.
The PLS-85 is suited for high-precision applications with limited space while allowing loads of up to 6 [7] kg. Cross-roller bearings guarantee high guidance stiffness.
The RTHM-100 compact rotation stages are designed to rotate optical components and small tooling in confined spaces, such as laser cavities, disk texturing machines or manufacturing areas for fiber optical components and semiconductor devices.
The LSA series stages from Zaber are built to fit into the small spaces, without hindering any of the features or performance. These robust stages have up to 10mm/s speed and up to 3.5kg thrust. Their microstep size of less than 25nm and <1um repeatability enable reliable ultra-fine positioning.
Zaber’s LAC Series compact motorized linear actuators are very small actuators with a 0.024µm microstep size. The LAC actuators provide excellent resolution, and are wired with a male D-sub 15 connector to enable plug-and-play that can be used with the A-MCA Series stepper motor controllers. Controllers can be daisy-chained with other A-Series or T-Series products from Zaber using a single serial or USB port.
The M-687 reference-class XY microscope stage includes a joystick and a controller. It also has a 160 x 110 mm clear aperture.
The design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. Planar ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery
H-206 automated fiber alignment system includes a parallel-kinematic design for six degrees of freedom making it considerably more stiff and compact when compared to serial-kinematic systems, guidance errors of individual axes do not add up.
The H-820 standard-class 6-axis positioning system includes a parallel-kinematic design for six degrees of freedom making it considerably more compact and stiff than serial-kinematic systems, higher dynamic range and no moved cables.
The compact parallel kinematic design permits a low overall height of below 90 mm and a diameter of only 100 mm.
The P-630 has a reference class nanopositioning system on a single axis, a directly driven flexure-guided design and a capacitive position sensor for maximum linearity and stability.
The Voice Coil Stage is used in positioning applications where high speed and high accuracy are required. The stage may be used in the following industries; Semiconductor, Disk Drive, Automotive, Medical, Industrial, Optical, Test and Manufacturing. The non-commuted motor construction increases reliability. The direct coupling of the motor to the stage allows for fast acceleration / deceleration and high speed operation. The Voice Coil Stages do not need commutation and using a position sensor, positioning resolutions of less than one micron or 0.00004 inches are achievable.
The Linear Three Phase Brushless Motor Driven Positioning System is used in positioning applications where high speed and high accuracy are required. The stage may be used in the following industries; Semiconductor, Disk Drive, Automotive, Medical, Industrial, Optical, Test and Manufacturing. The direct coupling of the motor to the stage allows for fast acceleration / deceleration and high speed operation.
The T-NA series devices from Zaber are computer-controlled linear actuators that are designed with up to 50mm travel and 50nm resolution. They are standalone devices requiring just a basic 15V power supply.
The micro actuator MA-35 was developed for applications with limited space conditions or where high-precision actuators must be positioned decoupled of the drive.
Integrated multi-axes XYZ systems built with LSMA-175 Series motorized actuators provide travel up to 200 mm. Driven by a brushless or stepper motor with a precision ground ball screw this motorized stages offers high-resolution up to 0.1 micron. Actuator has low profile high-stability compact and monolithic design as its main feature and together with its high resolution makes the device ideal for its integration in high precision measurement and manufacturing systems.
The new rotation stage DT-80R is a cost-effective alternative to the PI miCos DT-65 N and PRS-110 high precision rotation stages.
The T-LSM series devices from Zaber are computer-controlled motorized linear stages that have good thrust and speed capabilities. They are very compact in size and operate as standalone units requiring just a regular 15V power supply.