P-911K UHV-Compatible Miniature Piezo Hexapod from Physik Instrumente

P-911K UHV-Compatible Miniature Piezo Hexapod from Physik Instrumente

The compact parallel kinematic design of the P-911K permits a low overall height of below 90 mm and a diameter of only 100 mm. NEXLINE® piezo stepping motor drives and integrated incremental sensors ensure a position resolution down to 0.1 µm in the linear axes.

Key Features

The key features of the P-911K are:

  • Ultra-compact
  • Load capacity to 1.5 kg
  • Travel ranges to 1.5 mm, to 2°
  • With NEXLINE® piezo stepping drives
  • UHV-compatible to 10-9 hPa
  • Non-magnetic
  • Ultra-high precision flexure joints
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