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UHV Vacuum Nanopositioning Stage from Physik Instrumente

PI miCos stages can be designed for UHV and cryo applications. To reach a vacuum level of 10-9  mbar the material of the stages have to be selected carefully.

Special end switches for a wide temperature range and special 2 phase stepper motors with stainless steel housing, actively heated up to 120°C for outgasing can be adapted.

This nanopositioning stage provides precision positioning in UHV conditions. The specifications are as follows:

  • 200 mm Positioning Range
  • ±0.02 microns Reproducibility
  • 100 mm/second Velocity
  • Payload to 35 kg
  • Linear scale encoder (center mounted)
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