The M-664 micropositioning systems from Physik-Instrumente are low-profile, high-accuracy translation stages with linear encoders. The M-664 stage is next-larger in the series of piezomotor-driven stages of which the M-663 is the smallest. For improved guiding accuracy, the M-664 uses two crossed roller bearings mounted on ground aluminum profiles. The integrated P-664 PILine® linear motor can generate forces up to 4 N and maximum closed-loop velocities to 400 mm/s over a 25 mm travel range.
Features
Features of the M-664 micropositioning systems include:
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Travel Range 25 mm\
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Max. Velocity 400 mm/s
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Ultra-Low Profile, 15 mm
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Direct Metrology Linear Encoder with 0.1 µm Resolution
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High Guiding Accuracy with Crossed Roller Bearings
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Compact XY Combinations
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Piezo Linear Motor with 4 N Drive Force
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Self Locking at Rest
Advantages of PILine® Micropositioning Systems
The ultrasonic piezoceramic drives used in PILine® micropositioners have a number of advantages over classical drives:
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Higher Accelerations, up to 5 g
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Speeds up to 500 mm/s
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Small Form Factor
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Self-Locking When Powered Down
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No Shafts, Gears or Other Rotating Parts
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Non-Magnetic and Vacuum-Compatible Drive Principle
Application Examples
M-664 micropositioning systems are suitable for use is:
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Biotechnology
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Micromanipulation
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Microscopy
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Quality assurance testing
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Metrology
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Mass storage device testing
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R&D
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Photonics packaging