H-850K Parallel Kinematics Hexapod Precision Positioning System for Ultra-High Load from Physik Instrumente

The H-850 parallel kinematics hexapod precision positioning sysem is used for positioning high loads in six axes of freedom, special requirements have to be met by the positioning system. The H-850KHLC Hexapod aligns elements in vacuum environments with highest precision, the mechanical coupling is adapted to the vacuum chamber‘s characteristics.

Key Features

The key features of the H-850 hexapod precision positioning system are:

  • Vacuum compatible to 10-6 hPa
  • Six Degrees of Freedom
  • Drive: brushless DC motors with gearhead
  • Sophisticated controller using vector algorithms
  • Load capacity to 1500 kg
  • Travel ranges to 340 mm / 60°
  • Min. incremental motion < 1 µm
Ask A Question

Do you have a question you'd like to ask the manufacturer of this equipment or can you provide feedback regarding your use of this equipment?

Leave your feedback
Other Equipment by this Supplier
Other Equipment