This reference-class linear positioner comprises a self-clamping non-magnetic motor
with sub-nanometer resolution. High-accuracy is offered by crossed roller bearings and a direct measuring high-precision, sub-nanometer resolution linear
The key features of the N-664 are:
- Travel range of 30 mm.
- Encoder resolution of 0.5 nm.
- Self locking motor.
- Superior guiding accuracy.
- Velocity of 10 mm/s.
- Vacuum version available.