Vacuum Nanopositioning Stages - P-915 from PI

P-915KLVS high-dynamics, vacuum compatible, high-load nanopositioner XYZ piezo scanner offers a very large clear aperture of 200 x 200 mm.

Features & Advantages

  • Vacuum Compatible to 10-6 hPa
  • Direct Metrology with Capacitive Sensors
  • Excellent Straightness: <0.1 µrad Runout
  • Frictionless, High-Precision Flexure Guiding System
  • Direct Metrology with Capacitive Sensors
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