PI has developed a small XYZ Nanopositioning Stage based on air-bearing guide technology and voice coil direct-drive linear motors. In addition, PI has presented a high-speed photonics alignment system with the help of the same mechanics plus advanced alignment algorithms functioning on an ACS controller.
The small 3-axis nanopositioning stage relies on PI’s A-142, miniature air-bearing slide, and is ideal for high-dynamics positioning, high-accuracy, scanning and alignment applications in optics, semiconductors, photonics, etc.
Depending on a highly dynamic frictionless and wear-free precision motion system, this multi-axis linear translation stage performs well with 10 mm XYZ travel and a compact footprint of just 80 × 90 mm.
The Z-axis consists of a combined counterbalance to redress for gravitation forces and improve the dynamics and performance of the Z-axis motor. The XYZ nanopositioning stage has combined linear encoders with a resolution of 5 nm.
For industrial automation and research applications, PI offers various motorized XYZ precision positioning stages with several motor and drive options. For the highest accuracy and performance, closed-loop, piezoelectric, flexure-guided 3-Axis nanopositioning stages are suggested with shorter travel ranges.
PI A-142 Fast XYZ Photonics Alignment System w/Air Bearings & Linear Motors at Photonics West
An A-142-based, high-speed XYZ photonics alignment system, as shown at the 2023 Photonics West conference. The frictionless 3-axis air bearing stage is operated by an advanced ACS motion controller with on-board advanced search and alignment algorithms for fiber optics and similar applications. Video Credit: PI (Physik Instrumente) LP
XYZ nanopositioning stage – compact 3-axis high-dynamics motion system based on the A-142 air-bearing linear slide. The Z-axis has an integrated counterbalance to offset the weight force of the moving table and load. Image Credit: PI (Physik Instrumente) LP
XYZ Stage - Air Bearing Miniature Nanopositioning / Scanning Stage, Voice-Coil Motors | PI
XYZ-Nanopositioning Stage with air bearings for high-dynamics, 24/7 high-duty cycle applications in automation, manufacturing, test & metrology, scanning, and alignment. Air bearings do not generate particles and are compatible with cleanroom manufacturing. Video Credit: PI (Physik Instrumente) LP
The A-142 single-axis air-bearing linear slide is the basis for the XYZ nanopositioning stages. This miniature linear nanopositioning stage boasts several highly competitive specifications: 10 mm travel range, 3 kg load capacity, 450 mm/sec max velocity, and up to 2 g acceleration. It features an integrated frictionless, direct-drive voice-coil linear motor and a linear encoder. Image Credit: PI (Physik Instrumente) LP