CVD Equipment Corporation
(Nasdaq: CVV) announces the introduction of a family of EasyTube™
Systems with a focus on Quality Control and Research & Development for next
generation process development in the Solar and Energy fields aimed at reducing
the global dependence on oil and gas. The EasyTube™ platform provides
a framework of solutions that can be quickly and cost efficiently customized
to a wide variety of thin film process requirements needed to accelerate the
commercialization of next generation solar cell/modules and smart windows.
For example, our EasyTube™ 3000-SiQC systems have been sold to qualify
Silicon precursor materials for the solar and semiconductor industry (http://www.cvdequipment.com/ET3000_SiQC
1 12.pdf). These systems are used for quality control of the Chlorosilane precursors
used to manufacture polycrystalline silicon rods. By using the same precursor
to deposit an epitaxial film that is measured for purity, the purity of the
Silicon precursor material can be determined. This quality control tool will
help develop lower cost manufacturing methods for Polysilicon precursors being
proposed to manufacture solar cells with only slightly reduced photovoltaic
conversion efficiencies.
In addition, the EasyTube™ research systems are capable of other film
depositions, for example Amorphous Silicon, Polysilicon, Silicon Nitride, High
or Low temperature Silicon Dioxide, Silicon and Silicon-Germanium Epitaxial,
Transparent Conductive Oxides (SnO2, ZnO, etc.), Sulfurization, Selenization,
Rapid Thermal Annealing, POCl3 and other related diffusion driven processes
needed for next generation Silicon and CIGS solar cell process optimization.
The EasyTube™ system can be equipped with a wide variety of options, including
a Loadlock, operation at high or low pressures, substrate rotation for deposition
and composition uniformity, rapid heating and many others. The EasyTube™
process gas handling system accommodates pyrophoric, flammable, corrosive, toxic,
solid and liquid source materials. Optional gas, liquid or solid source delivery
and process gas exhaust treatment enable turn-key process solutions that save
both time and money.
The highly successful EasyTube™ product line has been sold worldwide
to Universities and Research Laboratories for applications in the Nanotechnology
and Semiconductor Research Markets. The expanded EasyTube™ product line
focuses on applications in the Solar and Energy industry to provide lower cost
research and faster delivery to develop solar and energy related manufacturing
processes.