Aviza Technology, Inc., a supplier
of advanced semiconductor capital equipment and process technologies
for the global semiconductor industry and related markets, today
announced it has shipped its Omega fxP deep silicon (DSi) etch system
to STMicroelectronics. The system is being used for manufacturing
leading-edge MEMS (Micro Electro-Mechanical Systems) devices at ST's
new 200mm facility in Agrate, Italy; Europe's first 200mm volume
production MEMS fabrication plant.
The Omega DSi system is equipped with 4 process modules, each
capable of multiple applications for volume production. The principle
applications are high-rate etching (greater than 30 micron/min) of deep
cavities that encapsulate MEMS devices, and etching deep trenches
stopping on an oxide isolation layer.
"During the selection process, Aviza was able to demonstrate
their technical capabilities and meet our production requirements for
two key etch processes," said Patrizia Introini, General Manager of
ST's Agrate Manufacturing Operation. "In addition, Aviza has
demonstrated fast response times and a strong global service and
support infrastructure, which are very important criteria for our
suppliers. These factors made Aviza the ideal candidate to support
STMicroelectronics' etch technology requirements for MEMS
manufacturing."
The number of consumer applications incorporating MEMS devices
continues to grow, including microphones in cell phones, accelerometers
and gyroscopes in consumer gaming applications, optical MEMS for TVs,
and automotive sensors. As of 2006, the European MEMS manufacturers
represented 16-percent market share, or $6 billion, of the global MEMS
market (Source: SEMI, November 2006). Overall market figures have
indicated growth forecast of about 100% in the five years from 2005 to
2010, with the worldwide MEMS market approaching $10 billion by 2010.
"STMicroelectronics is a valued customer and long-term partner
of Aviza. We are very pleased that they have selected our deep silicon
etch system for volume production of MEMS devices," said Kevin Crofton,
Vice President and General Manager, PVD/CVD/Etch Business Unit of Aviza
Technology, Inc. "STMicroelectronics is at the forefront of MEMS device
manufacturing and our deep silicon-etch technology offers a unique
solution for this growth market."