PI (Physik Instrumente)
L.P. a leading manufacturer of ultra-precision motion-control
and sensing equipment for bio / nanotechnology, photonics,
semiconductor and life science applications -
offers a new brochure on capacitive nanometrology displacement sensors
and electronics.
The brochure presents PI’s state-of-the-art sensor
systems and also features a tutorial on single plate and dual plate
capacitive sensors and an applications overview:
- Measuring Displacement with Nanometer Precision
- Nanopositioning / Closed-Loop Systems
- Parallel Metrology / High-Precision Multi-Axis Measurements
- Measuring Straightness and Flatness / Active Cross-Talk
Compensation
- Out-of-Plane Measurement / Constant-Height Scans /
Out-of-Round Measurement
- Tip / Tilt Measurement and Compensation
- Measuring Vibration, Flatness, Thickness
- Force Sensors with Micronewton Sensitivity
- Layer Thickness Measurement with Sub-Micron Accuracy
The brochure is free of charge and can be ordered from PI; a
PDF is also available for download at http://www.physikinstrumente.com/en/products/capacitive_sensor/index.php