QuantumClean and SEMATECH Partner to Advance Methods to Meet Sub-20nm Wafer Fabrication Process Requirements

Published on April 30, 2014 at 5:55 AM

Quantum Global Technologies LLC, parent company to QuantumClean®, the leading global provider of validated high-purity outsourced process tool parts cleaning, surface treatment, refurbishment, analytical and engineering services to the semiconductor, solar and LED industries, and ChemTrace®, an industry-recognized leading microcontamination analytical testing laboratory, today announced it joined SEMATECH in Albany NY, to advance process tool chamber parts cleanliness and analytical methods to meet sub-20nm wafer fabrication process requirements.

Under the terms of the agreement, SEMATECH and QuantumClean will collaborate in the development of new methodologies involving process tool chamber parts cleaning and analytical methods for detecting particles beyond today's capabilities.

"We are extremely pleased to enter into this agreement with SEMATECH", stated Dr. Ardeshir Sidhwa, QuantumClean's Sr. Director of Innovation & Technology. "We constantly strive to advance technologies and provide innovative solutions to our leading-edge wafer fab and OEM customers. As our industry advances towards sub-10nm nodes, QuantumClean will be prepared for the challenges of surface preparation and cleanliness, removing and measuring particles and contamination well-beyond today's capabilities," concluded Dr. Sidhwa.

"QuantumClean is the first and only outsourced semiconductor process tool parts cleaner that has the vision to join SEMATECH," stated David Zuck, COO of Quantum Global Technologies. "QuantumClean has always invested a significant portion of its profits into parts cleaning and analytical technology development to meet the ever-increasing requirements of the industry's leading-edge wafer fabs and OEMs. However, in sub-20nm design node manufacturing, traditional part clean methods and related metrology prove ineffective. Through collaboration with SEMATECH, which is already working on 11nm and 7nm design node solutions, these challenges will be overcome and QuantumClean will incorporate this knowhow into our business to the benefit of our customers," concluded Mr. Zuck.

"SEMATECH's goal is to build the infrastructure needed to successfully implement future device nodes. Our work to investigate the generation, propagation, removal, and impact of defects generated by equipment, equipment components, and materials used in advanced semiconductor processes helps enable these supply chain elements to meet the difficult contamination requirements of the upcoming device nodes," said Michael Lercel, SEMATECH's senior director of Technology. "Our partnership with QuantumClean brings additional expertise in precision parts cleaning to SEMATECH, and in turn will raise the level of our research efforts and further strengthen SEMATECH's commitment in identifying the challenges of future technology nodes."

Source: http://www.quantumclean.com

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