Carl
Zeiss SMT presents at Microscopy & Analysis 2007 its
newly developed “ULTRA plus” Scanning Electron
Microscope (SEM) with unique technology for charge compensation of
non-conductive samples. For the first time, high resolution, stable and
noise-free images from samples such as ceramics, polymers, fibre optics
and many more can be obtained even at high acceleration voltage and
high probe current. This technological advancement was specifically
developed for satisfying increasing customer demands in analytical
research, development and testing of advanced materials. For the
purpose of charge neutralization, a proprietary gas-injection system
enables for a local flush application of an inert gas. Thereby,
electrostatic charging of samples is neutralized and detection of
secondary electrons (SE) as well as backscattered electrons (BSE)
becomes feasible. Numerous applications in life sciences, materials
analysis and semiconductors will profit from this development.
Complete detection system in
ULTRA plus
Using the new proprietary gas-injection system, both the use
of the unique in-lens SE detector as well as the in-lens EsB detector
(Energy selective Backscattered) of the industry-proven ZEISS ULTRA
field-emission SEM becomes possible. Thereby, for the first time
non-conductive samples can be investigated in the ULTRA not only under
low-voltage imaging conditions, but also at high voltage and high probe
current to use the full functionality of the leading ULTRA microscope
capabilities. Together with the AsB (Angle selective Backscattered)
detector for low-angle backscattered electrons revealing orientation
contrast as well as the chamber-mounted Everhart Thornley detector for
topographical contrast, the ULTRA plus offers a complete detection
system for all applications on conductive as well as non-conductive
samples.
Wide variety of customer
specific configurations
For meeting the various customer demands, the new and unique
ULTRA plus system can be adapted to a wide variety of system
specifications. There is optionally a 80 mm load lock available with a
pump time of as little as 30 seconds. Also available will be a 6-axes
super eucentric motorized stage with a location repeatability of
1µm. A very useful system feature is a 100µm beam
shift, which allows the investigation of a rather large field of view
without moving the sample mechanically. The OptiProbe mode enables a
continuous adjustment of the beam current from 12 pA to 40 nA.
Moreover, the so-called quiet mode enables switching off the vacuum
prepump, allowing for up to 40% savings in power consumption.
The ULTRA plus system will be available as of October 2007.