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PANalytical to Launch its New 2830 ZT Wafer Analyzer at SEMICON Japan 2008

Published on December 2, 2008 at 6:15 PM

PANalytical (Almelo, the Netherlands) will launch its new 2830 ZT Wafer Analyzer at SEMICON Japan 2008, 3-5 December. The 2830 ZT offers the ultimate capability for simultaneous non-contact determination of layer thickness and composition. Designed specifically for the industry, it provides manufacturers with a powerful tool for achieving the tightest process monitoring throughout the entire production chain.

With the new 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) instrument, users benefit from highly accurate and precise determination of layer composition, thickness, contamination, dopant levels and surface uniformity on wafers up to 300 mm. It offers simultaneous measurement of up to 24 elements on stacks of up to 16 layers.

A host of new features, including the 4kW SST-mAX tube with ZETA technology, ensures that the system delivers and maintains fast and cost-effective multi-layer analysis with unrivalled precision and maximum uptime. ZETA technology eliminates X-ray tube aging, which greatly enhances operational efficiency and strongly reduces the need for drift correction and recalibration. Productivity and instrument uptime are significantly improved as a result. Furthermore, SST-mAX allows operation at a high constant current of 160 mA, delivering the highest sensitivity for exceptional light element performance.

The 2830 ZT is supplied with PANalytical’s advanced SuperQ software, which includes the FP Multi. The intuitive user interface ensures that even inexperienced operators can carry out fully automated fundamental parameter analysis of multi-layers.

The 2830 ZT builds on the achievements of its predecessor the PW2830, which broke new ground by becoming the first X-ray metrology system to comply with all 300 mm standards. The 2830 ZT meets all current industry norms and standards to provide fully automated, contamination-free wafer handling. With a small footprint, excellent tool matching capabilities and various wafer loading options, ranging from manual to automatic, the 2830 ZT integrates seamlessly into any fabrication environment.

For detailed information on the 2830 ZT, visit PANalytical on booth #2A-203 at the world’s largest exposition of semiconductor equipment and materials. In addition to the 2830 ZT launch, PANalytical’s full range of innovative X-ray metrology solutions will be on display in Japan.

For more details of the PANalytical range of advanced metrology tools, visit: http://www.panalytical.com/2830ZT

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