The Advantages of Using the Zeta 3D Optical Profiler for Edge Inspection and Metrology

Topics Covered

Introduction
Key Features of the Zeta3D™
About Zeta Instruments

Introduction

The Zeta3D™ optical profiler is an ideal instrument (Figure 1) for edge inspection and metrology, with superior features such as XOD inspection, edge defect review edge trim step height and X-Y-è shift. It is a non-contact 3D optical profiler with an inspection option.

Figure 1. The Zeta-580 Optical Profiler with 200/300mm EFEM and automated s/w for Edge Inspection and 3D Metrology with full wafer mapping

Key Features of the Zeta3D™

The key features of the Zeta3D™ include:

  • Automated extreme edge (XOD) examination of the wafer
  • For calibration and monitoring operations
  • Full wafer inspection report with classification of defects
  • Possible to 3D optical profile defects
  • XOD edge trim step height
  • In-built microscope review capability
  • Corresponding to 100 percent bump inspection instruments
  • Manual or automated 200 and 300 mm systems are available

Figure 2. Edge Trim is critical for wafer thinning and dicing. Zeta-580 can be used to measure the step height at the extreme edge (XOD) of the wafer.

About Zeta Instruments

Zeta Instruments manufactures high-performance imaging systems that can analyze high-roughness, low-reflectance surfaces for solar cell, LED, and other micron-scale manufacturing test applications. Their wide-field imagers can provide a field of view in the millimeter range while accurately resolving 70nm z-heights and film thicknesses of 30nm. The Zeta 3D imaging software assembles gathered data and rapidly processes it to produce true-color 3D feature maps in a fraction of the time and cost of other microscopy systems. With available Nomarski Imaging and Film Thickness Measurement options, their systems provide the widest range, highest flexibility and best value for most metrology applications.

Zeta Instrument's system designs are based on decades of experience in metrology and measurement systems, with a team that brings together industry veterans from a wide background in precision instrumentation, metrology, optics, semiconductors, mechanical engineering and system software. Their combination of expertise is what forms the basis of their leading-edge measurement and imaging systems, as well as their commitment to innovative products and customer satisfaction

This information has been sourced, reviewed and adapted from materials provided by Zeta Instruments.

For more information on this source, please visit Zeta Instruments.

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