Using the Zeta-20 Optical Profiler for Difficult Surface Metrology

The Zeta-20 Optical Profiler from KLA is an ideal tool for handling difficult surface metrology. The Zeta-20 includes a spectrometer, a true color profiler and an interferometer.

It is highly capable of profiling a variety of surfaces such as poly-urethane, MEMS device for sensing pressure, RGB pixels imaged inside a cell phone, fabric for clean room clothing, micro needles for drug delivery and laser sealed plastic bag for food packaging.

Poly-urethane surface for CMP

Figure 1. Poly-urethane surface for CMP

MEMS Device for sensing pressure

Figure 2. MEMS Device for sensing pressure

Fabric for clean room clothing

Figure 3. Fabric for clean room clothing

Key Features

The key features of the Zeta-20 Optical Profiler include:

  • User-friendly with automated measurements requiring limited sample preparation
  • Versatile measurements that are free of physical properties or geometry
  • Rapid data recovery time
  • Complementary to other metrology methods
  • Minimal cost-of-ownership (COO)
  • Production worthy

                           

This information has been sourced, reviewed and adapted from materials provided by KLA Corporation.

For more information on this source, please visit KLA Corporation.

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