Flexible Multi-Mode Zeta™-20 3D Optical Profiling Microscope

The Zeta-20™ benchtop optical profiler is a non-contact 3D microscope and surface topography measurement system.

This 3D optical profiling system has been powered by patented ZDot™ technology and Multi-Mode optics, allowing measurement of a range of samples: transparent and opaque, smooth to rough texture, low to high reflectance, and step heights ranging from nanometers to millimeters.

The Zeta-20 3D optical profiling system combines six optical metrology technologies in one configurable and user-friendly system. ZDot measurement mode concurrently gathers a high-resolution 3D scan and a True Color infinite focus image.

Other 3D measurement methods include Nomarski interference contrast microscopy, white light interferometry, and shearing interferometry. Film thickness could be quantified with ZDot or a combined broadband reflectometer.

The Zeta-20 is a high-end microscope for sample review or automated defect inspection. The Zeta-20 3D optical profiling microscope assists R&D and production environments by offering extensive roughness, step height, film thickness measurements, and defect inspection capability.

Fully Integrated Zeta™-20 3D Optical Profiling Microscope

Image Credit: KLA Instruments™

Key Features

  • User-friendly optical profiler with ZDot and Multi-Mode optics to fulfill an extensive range of applications
  • High-quality microscope available for sample review or defect inspection
  • ZDot: concurrently gathers a high-resolution 3D scan and a True Color infinite focus image
  • ZXI: White light interferometry for extensive area measurements with high z resolution
  • ZIC: Interference contrast for quantitative 3D data of surfaces with sub-nanometer roughness
  • ZSI: Shearing interferometry for images available with high z resolution
  • ZFT: Film thickness and reflectance are quantified with a combined broadband reflectometer
  • AOI: Automatic optical inspection to measure defects on the sample
  • Production capability: completely automated measurements with sequencing and pattern recognition

Fully Integrated Zeta™-20 3D Optical Profiling Microscope

Image Credit: KLA Instruments™ 

Applications

  • Surface topgraphy: visualize and measure surface features in 3D
  • Step height: 3D step height from nanometers to millimeters
  • Stress: 2D thin film stress
  • Form: 3D bow and shape
  • Texture: 3D roughness and waviness on smooth to highly rough surfaces
  • Film thickness: transparent film thickness ranges from 30nm to 100µm
  • Defect inspection: capture defects greater compared to 1µm
  • Defect review: KLARF files may be utilized to navigate to defects to quantify 3D surface topography or scribe defect locations

Fully Integrated Zeta™-20 3D Optical Profiling Microscope

Image Credit: KLA Instruments™ 

Industries

  • Solar: photovoltaic solar cells
  • Semiconductor and compound semiconductor
  • Data storage
  • Semiconductor WLCSP (wafer-level chip scale packaging)
  • Semiconductor FOWLP (fan-out wafer-level packaging)
  • PCB (printed circuit board) and adaptable PCB
  • MEMS: Micro-electro-mechanical systems
  • Medical devices and microfluidic devices are provided
  • Universities, research labs, and institutes

Zeta butterfly

Image Credit: KLA Instruments™ 

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