Profilm 3D and Profilm 3D-200 | 3D Optical Surface Profilers

The Profilm3D® and Profilm3D-200 are affordable, state-of-the-art optical profilers. The Profilm3D family of profilers use industry-standard white light interferometry (WLI) and optional phase shifting interferometry (PSI) to produce high quality surface profiles and infinite depth-of-field True Color images. The newest generation of the Profilm3D includes Enhanced Roughness Mode and other advanced features to address more challenging applications such as low reflectivity and high roughness surfaces.

Applications for the Profilm3D non-contact optical profiler are highly varied and include step heights, surface roughness, etch depth, scratches, bow and curvature, and general surface characterization. These capabilities deliver crucial information for use in many fields, including 3D and flash printing, metal finishing and micromachining, semiconductor wafers and packaging, LEDs, MEMS, precision optics, biomedical devices, data storage, automotive, and more.

Key Features

  • Automated XY stage with
    • 100 mm x 100 mm travel (Profilm3D)
    • 200 mm x 200 mm travel (Profilm3D-200)
  • Autofocus with 100 mm travel
  • Four-position turret
  • Tip-tilt stage with ± 5° travel
  • Industry-leading 500 µm piezo travel
  • Industry-leading 2 mm-wide field-of-view with 10X objective
  • Profilm Desktop intuitive and user-friendly analysis software includes image operators, analysis functions, a graphics interface, and both manual and automatic image processing features
  • ProfilmOnline® web-based image visualization and analysis software for storing, sharing, and viewing 3D images

Optional Features

  • New! Enhanced Roughness Mode is optimized for low reflectance surfaces such as solar cells, rough surfaces such as CMP polishing pads, and steeply-sloped surfaces such as optical lenses
  • Phase Shift Interferometry (PSI) accurately measures sub-nm surface features
  • TotalFocus™ Infinite Depth-of-Field imaging delivers height profiles where every pixel is in focus
  • True-Color Imaging produces stunning 3D color images

Seashell imaged using TotalFocus™ and True-Color imaging.

Seashell imaged using TotalFocus™ and True-Color imaging. Image Credit: Filmetrics, a KLA Company

Solar cell measured using Enhanced Roughness Mode to resolve both large topography and low reflectivity surfaces.

Solar cell measured using Enhanced Roughness Mode to resolve both large topography and low reflectivity surfaces. Image Credit: Filmetrics, a KLA Company

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