Profilm3D® and Profilm3D®-200

The Filmetrics® Profilm3D® and Profilm3D-200 from KLA Instruments are advanced yet cost-effective optical profilers. The Profilm3D class of profilers uses industry-standard white light interferometry (WLI) and optional phase shifting interferometry (PSI) to generate high-quality surface profiles and infinite depth-of-field True Color images.

The Profilm3D non-contact optical profiler finds use in very different applications, such as etch depth, step heights, scratches, bow and curvature, surface roughness and general surface characterization.

Key Features

  • Automated XY stage with
    • 100mm x 100mm travel (Profilm3D)
    • 200mm x 200mm travel (Profilm3D-200)
  • Autofocus with 100mm travel
  • Four-position lens turret
  • Industry-leading 500µm piezo travel
  • Industry-leading 2mm-wide field of view with a 10X objective
  • Tip-tilt stage with ± 5° travel
  • ProfilmOnline® web-based image visualization and analysis software helps store, share and view 3D images
  • Profilm Desktop easy-to-use and intuitive analysis software includes a graphics interface, image operators, analysis functions and both manual and automatic image processing features

Optional Features

  • Phase Shift Interferometry (PSI) precisely quantifies sub-nanometer surface features
  • TotalFocus™ Infinite Depth-of-Field imaging provides height profiles where each pixel is in focus
  • True-Color Imaging helps generate vivid 3D color images
  • New! Enhanced Roughness (ER) mode is optimized for low reflectance and rough surfaces like solar cells, as well as steeply-sloped surfaces such as Fresnel lenses

Seashell imaged using TotalFocus™ and True-Color imaging.

Seashell imaged using TotalFocus™ and True-Color imaging.

Image Credit: Filmetrics, a KLA Company

Stainless steel coating measured with 50X objective.

Stainless steel coating measured with 50X objective.

Image Credit: Filmetrics, a KLA Company

Other Equipment by this Supplier