Precision Surface Metrology Optical Non-contact Profiler Zeta™-300

The Zeta™-300 optical surface metrology tool offers multiple measurement modes with integrated acoustic isolation to reduce the effects of sound and air currents on surface measurements. When gathering data on structures that are less than 1µm high, even small vibrations caused by sound and air disturbances can affect the results. Coupled with an optional isolation table, the Zeta-300 delivers accuracy and repeatability unmatched by other optical profilers, and is designed to support both R&D and production environments.

Flexible Hardware & Software Options

In research, it is often unpredictable as to what type of surface will need to be measured. With this in mind, the Zeta-300 offers a modular design that allows for a wider range of hardware measurement options as well as software packages:

  • Film Thickness Spectrometer
  • DIC/Nomarski for nanometer-scale roughness
  • Bright-field and Interferometric objectives
  • Piezo stage for 3 nm z-resolution
  • Tilt stages, sample holders and vacuum chucks
  • Automatic feature detect/measure software
  • Automatic surface area calculation, statistical analysis
  • ...and much more!

User Testimonial

The diversity and speed of the KLA are unmatched qualities of this system that make it indispensable in the lab. The customer service is fast and helped us even with the most unique and special requests we had, including personal software updates.

Florian Stumpf, Fraunhofer Institute IISB, Germany

Application-Specific Metrology

The Zeta-300 surface metrology tool supports multiple applications, including those listed below:

LED, PSS & PEC Analysis

  • Auto Height, Diameter & Pitch for PSS
  • Analyze photoresist or post-etch PSS bumps
  • Auto feature detect, roughness for post-epi mesa analysis
  • 2”, 4” & 6” wafer vacuum chucks

Solar Cell and Wafer Analysis

  • Auto Finger Height, Width & Volume
  • Poly-Si and Mono-Si Surface Area & Texture
  • Silicon-Nitride AR Film Thickness
  • Multi-site and auto finger detect
  • 156mm solar wafer vacuum chuck

Microfluidics and MEMS analysis

  • Transparent multi-surface profiling of both open and closed channels
  • Deep trench/well & high aspect ratio feature profiling
  • Programmable cursors and cross-sections

Ease-of-Use Features

  • Multi-site sequencing and multi-FOV 3D image stitching with auto-stage option
  • Auto-slope and waviness compensation
  • Auto-surface leveling
  • Auto-feature height, dimensions, angle, area
  • Auto-linear and areal roughness

Other Equipment by this Supplier

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.