Posted in | Profilometers

The Tencor™ P-17 Stylus Profiler from KLA Instruments™

The P-17 stylus profiler surface measurement system from KLA Instruments provides excellent measurement repeatability for consistent measurement of 2D and 3D topography. It has 200mm scan length standard that can provide long scan capability without the need for stitching. The P-17 OF (Open Frame) configuration provides a larger frame for samples up to 300mm.

The P-17 measurement head includes the UltraLite® sensor, which delivers dynamic force control, exceptional linearity, and high vertical resolution, making it an ideal sensor for characterization of step height, surface roughness and waviness, bow, thin film stress, and defect review.

The P-17 stylus profiler is designed for ease-of-use, with fast recipe setup, top and side view optics and a 5MP high resolution color camera. Advanced data analysis and automated production features are equally suited to R&D, university, and production environments.

Key Features

The main features of the P-17 stylus profiler include:

  • Vertical range from nm up to 1mm
  • Constant force control from 0.03 to 50mg
  • Full diameter scanning without stitching for bow and film stress measurement
  • Superior measurement repeatability and reproducibility
  • Easy-to-use software, including fully-automated measurement with sequencing, pattern recognition, and SECS/GEM
  • Fully-motorized XY stage, Z stage, and 360° theta stage


The main applications of the P-17 stylus profiler include:

  • Thin and thick film step height measurements
  • Surface roughness and waviness characterization
  • Photoresist / soft films
  • Etched trench depth
  • Defect review and defect analysis
  • Surface curvature and form
  • 2D stress of thin films
  • 3D imaging of various surfaces
  • Dimensional analysis and surface texture

Broad Range of Industries

The P-17 capabilities support research, production, and quality control (QC) across a wide range of industries, including:

  • Universities, research labs, and institutes
  • Medical devices
  • Semiconductor and compound semiconductor
  • SIMS craters
  • LED (light-emitting diodes) and power devices
  • Solar
  • Automotive
  • MEMS (micro-electro-mechanical systems)
  • Data storage

Other Equipment by this Supplier

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.