The Filmetrics® R50 benchtop sheet resistance mapping tool represents over 45 years of technical innovation from KLA. The R50 can be configured as either a contact four-point probe (4PP) or non-contact eddy current (EC) probe mapper of sheet resistance, resistivity, thin film and metal film thickness, substrate resistivity, and backside layer thickness.
The R50 configuration is typically determined for a specific set of applications. The R50-4PP configuration is recommended for thinner metal and ion implant processes, and the R50-EC configuration is recommended for measuring thicker metal layers and sensitive or flexible surfaces. These configurations are both available in 100mm and 200mm versions (R50-200-4PP and R50-200-EC) to accommodate larger samples.
Typical samples mapped by the R50 include:
- Semiconductor, compound semiconductor and glass substrates
- Solar cell and flat panel display (FPD) layers
- Metal foils and coatings
- Printed circuit boards
- Flexible substrates
- Wearable materials, such as conductive fabrics
- Coated optical prisms, and custom shapes requiring large sample height clearance
The R50 hardware platform shares the familiar Filmetrics® Profilm3D® design and software interface, with the Filmetrics RsMapper software specialized for resistivity measurements. Key features of the R50 include:
- 100mm sample Z range with coarse and precision height control and approach
- Sheet resistance measurement spans a ten-decade range on conductive and semi-conductive films
- User-specified sample point mapping using rectangular, linear, polar, and custom configurations
- High precision X-Y stage provides travel up to 200 mm
- Easy-to-use software interface
2μm Al layer thickness map from the Filmetrics R50. Image Credit: KLA Instruments™