Oxford Instruments Plasma Technology

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North End
Yatton
Bristol, BS49 4AP
United Kingdom
PH: +44 (0) 1934 837000
Fax: +44 (0) 1934 837001
Email: plasmainfo@oxinst.com
Visit Oxford Instruments Plasma Technology Website or Request Quote for Further Information

Company Background

Oxford Instruments Plasma Technology provides a range of high performance, flexible tools to semiconductor processing customers involved in research and development, and production. We specialise in three main areas:

Etch
- RIE, ICP, DRIE, RIE/PE, Ion Beam
Deposition
- PECVD, ICP CVD, Nanofab, ALD, PVD, IBD
Growth
- HVPE, Nanofab

Technologies:

Plasma Etch and Deposition
Atomic Layer Deposition(ALD)
Ion Beam Etch and Deposition
Nanoscale Growth Systems
Hydride Vapour Phase Epitaxy

Markets:

Display and Lighting
Semiconductor Electronics
Energy
Information & Communication Technology
Niche and Emerging Markets

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