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Oxford Instruments Plasma Technology

Oxford Instruments Plasma Technology

North End
Yatton
Bristol, BS49 4AP
United Kingdom
PH: +44 (0) 1934 837000
Fax: +44 (0) 1934 837001
Email: plasmainfo@oxinst.com
Visit Oxford Instruments Plasma Technology Website or Request Quote for Further Information

Company Background

Oxford Instruments Plasma Technology provides a range of high performance, flexible tools to semiconductor processing customers involved in research and development, and production. We specialise in three main areas:

  • Etch
    • RIE, ICP, DRIE, RIE/PE, Ion Beam
  • Deposition
    • PECVD, ICP CVD, Nanofab, ALD, PVD, IBD
  • Growth
    • HVPE, Nanofab

Technologies:

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