Aviza
Technology, Inc., a supplier of advanced semiconductor
capital equipment and process technologies for the global semiconductor
industry and related markets, today announced it has received an order
for its Celsior™ single-wafer atomic layer deposition (ALD)
system from SVTC
Technologies, a U.S.-based process development foundry for
established and start-up semiconductor companies. SVTC is installing
this capability for its customers who have requirements for ultra-thin
high-k and metal films for Flash, non-volatile memory and high-voltage
applications.
Aviza’s Celsior ALD system is the process tool of
record used by leading DRAM manufacturers in China, Taiwan, Europe and
the U.S. for select applications in high-volume production today. This
SVTC order marks a significant milestone, as it demonstrates the
potential for Aviza’s ALD process and technology capabilities
outside of the traditional DRAM market into other areas such as Flash
and nanotechnology applications.
“SVTC’s customers are pushing the envelope
in process and materials development and the capabilities of the
Celsior ALD system will allow them to continue on their development
roadmaps well into the future,” said Bert Bruggeman,
SVTC’s VP of Operations and General Manager. “We
selected the Celsior because of the flexibility it offers to our
customers’ development teams.”
“Aviza is pleased that our production-proven Celsior
ALD system was selected by SVTC,” said Subrata Chatterji,
Vice President and General Manager, ALD Business Unit of Aviza
Technology, Inc. “Placing a tool at SVTC enables Aviza to
extend its ALD technology to SVTC’s diverse customer base and
also allows Aviza to expand the reach of its process and technology
capabilities outside of the traditional DRAM market to other key
markets such as Flash.”