Eulitha AG

Eulitha AG
Industriestrasse Althau 1
5303 Wurenlingen
PH: +41 (56) 281 21 52
Fax: +41 (56) 310 41 53
Visit Eulitha AG Website or Request Quote for Further Information

Company Background

Eulitha AG is a spin-off company of the Paul Scherrer Institute, Switzerland. It specializes in the development of lithographic technologies for applications in photonics, optoelectronics, semiconductors and biotech.

It manufactures and markets nano-patterned samples and templates using its own PHABLE™ tools and state-of-the-art e-beam lithography systems. PHABLE™ is the brand name of its proprietary photolithography platform, which includes exposure tools and wafer patterning services.

The PHABLE-Technology is a breakthrough for low-cost production of sub-micron periodic structures over large-areas with a non-contact exposure system.

Products and solutions:


  • PhableR 100

Nano-patterned Products

  • Silicon templates for nano imprint
  • Quartz stamps for nano imprint
  • Nickel stamps for nano imprint
  • Standard photonic stamps
  • Photomasks, phase gratings
  • Custom patterning projects, consulting
  • E-beam lithography services


  • E-beam lithography
  • Photolithography
  • Thin film etching and deposition