EBSD Detector for Dynamic Imaging at Nanoscale Resolution

The new EBSD detector eFlashFS from Bruker offers excellent sensitivity to allow high-speed EBSD measurements without changing the quality of data, even on tough applications such as lightweight or deformed materials.

In order to enhance the pattern quality, the eFlashFS cooling system has been upgraded to reduce its operating temperature and decrease the dark current of the CCD camera as far as possible.

In comparison with the former eFlashFS, the new detector’s sensitivity has been enhanced by a factor of three and a dark current drop by a factor of four. The acquisition of a 400 x 300 pixels slice/map is prepared as fast as ~2 minutes 10 seconds. This implies that the data acquisition part of a 70 slices 3D EBSD data cube (8.4 M voxels) will need just ~2.5 hours.

In transmission mode, orientation mapping uses the new detector retrofitted with the unique OPTIMUS™ TKD detector head. Now, orientation mapping can be done at a speed of up to 630 fps, achieving an effective spatial resolution of at least 10 nm.

Whenever essential, the effective spatial resolution can be enhanced down to 2 nm, using a smaller aperture on the SEM column, and sacquisition speeds of up to 300 fps with superior indexing rates can still be achieved.

Key Features

The main feature of the eFlashFS is listed below:

  • Outstanding increase in efficiency
  • Reduces artifacts induced by beam instability
  • Offers excellent speed and sensitivity capabilities
  • Typical measurement times of just a few minutes per map


The major applications of the eFlashFS are as follows:

  • Ideal option for every “Hough based” EBSD application
  • Perfect solution for dynamic experiments such as in-situ compression / tensile testing and in-situ heating
  • 3D EBSD is possible due to the superior sensitivity and speed capacities
  • Suitable solution for low kV EBSD applications and Transmission Kikuchi Diffraction (TKD) in the SEM aka transmission EBSD (t-EBSD)

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