Automated Step Height Metrology for Production Process Monitoring

In this webinar, KLA Instruments presents use cases in automated step height metrology for production process monitoring. The focus of this webinar is to discuss the use of automated 3D optical microscopes and 3D stylus profilers and their respective 3D metrology techniques for production applications.

About the Webinar

3D surface profilers have been used across many industries since the mid-1970s due to their ability to deliver critical topographic data. The size and type of samples measured using these techniques have grown exponentially to cover hundreds of industries, and 3D surface profilers and interferometers are now common in product manufacturing facilities.   

The use of 3D surface profiling in production environments requires specialized equipment that is designed to quickly and automatically measure and report data critical to production process control. KLA Instruments automation features have been developed from the superior technology and innovation history of KLA equipment in production fabs. This webinar discusses the design and usage of KLA Instruments' automated surface profilers specifically for these environments, and multiple use cases and measurement types are discussed. 

Watch a short clip from the webinar below:

Advantages of Attending This Webinar on Production Process Monitoring

  • Learn about the KLA Instruments product portfolio of metrology tools, including stylus and optical metrology
  • Understand the core technologies and key design elements used for KLA Instruments 3D optical profilers and 3D stylus profilers
  • Learn about specific applications for automated process monitoring and process control
  • Learn about automated surface analysis and results reporting
  • Understand the importance of tool calibration
  • Learn about additional surface profiler hardware and software features critical to fully automated stylus and optical metrology

About the Speaker



Jeff Reichert is the Senior Product Marketing Manager for KLA Instruments’ Automated Metrology group, which includes automated optical profilers and stylus profilers.

Jeff joined KLA in 2000 as an applications development engineer and held various roles in applications and applications management, supporting new customers and new product development. Customer support responsibilities included both benchtop and automated stylus and optical profilers. Jeff’s experience at KLA also includes applications support for Flexus thin film stress systems, RS sheet resistance measurement, and Candela® automated defect inspection.

Who Should Attend

Process engineers or process development engineers, or managers in the semiconductor, compound semiconductor, solar device manufacturing, wireless device manufacturing, LED, data storage, PCB, MEMS, or microfluidics industries, or those interested in production applications for automated surface profilometers, should attend this webinar.

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