Microfluidic Devices and Deep Trenches: 3D Optical Characterization

In this webinar, KLA Instruments presents use cases for through-glass measurements of microfluidic devices as well as deep trench measurements using the Zeta 3D optical profiler. The focus of this webinar is to discuss the use of non-contact 3D surface profilers for challenging surface metrology applications, including high aspect ratio device structures.

About the Webinar

3D surface profilers are in wide use today across many industries due to their ability to quickly deliver critical topographic data, and optical profilometers provide non-contact measurements of step height, surface roughness, curvature, and more. Important advantages of optical profilers include minimal sample preparation, measurement of and through transparent surfaces, and the ability to measure high aspect ratio structures.

Key metrology metrics of microfluidic devices include channel dimensions, interface effects, and surface roughness, all of which impact fluid flow. This webinar discusses the measurement techniques of the Zeta optical profiler specifically for these types of devices, including both open-channel and closed-channel measurements of surface roughness, cover thickness, and channel depth and width.

High aspect ratio measurements are required for many types of devices, including etched trenches, where the non-contact, non-destructive optical technique of the Zeta systems is especially important. This webinar discusses the use of this technology for accurate and automated measurements of deep trenches created by reactive ion etching (RIE), including trench depth, roughness, the radius of curvature of the trench bottom, and more.  

Watch a short clip from the webinar below:

KLA Microfluidic Devices and Deep Trenches 3D Optical Characterization


Advantages of Attending This Webinar on Production Process Monitoring

  • Learn about the KLA Instruments Zeta-20 3D optical profiler and its powerful Multi-Mode optical techniques
  • Learn details about the proprietary ZDot optical measurement technique
  • Understand the challenges of measuring multiple (including enclosed) surfaces of microfluidic devices and why the Zeta-20 is well-suited to these applications
  • Learn how Zeta capabilities are also used for high aspect ratio structures such as TSV vias, microneedles, RIE trenches, and more

About the Speaker



Kurt Rubin is a Senior Applications Development Engineer at KLA Instruments. Kurt focuses on enabling technology for New Product Introduction (NPI), advanced optical and electrical measurement, and modeling at KLA Instruments. Kurt has an extensive background in the invention of new optical, electrical, and magnetic devices and materials and the development of new processes to fabricate them.

Mr. Rubin has also invented some of the most fundamental technology underlying multilayer optical storage and high-speed reversible memories. He holds 60 patents and multiple degrees in physics and materials science from MIT, the University of Washington, and Stanford University.

Who Should Attend

Research, metrology, or process engineers and/or managers in the semiconductor, compound semiconductor, solar device manufacturing, wireless device manufacturing, LED, data storage, PCB, MEMS, or microfluidics industries, or those interested in challenging applications for 3D surface profilometers, should attend this webinar.

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