Profilm3D®: So Many Measurement Modes – Which One to Choose?

In this webinar, KLA Instruments™ presents an overview of the Filmetrics® Profilm3D® and its various optical profiler techniques, including white light interferometry (WLI), also known as vertical scanning interferometry (VSI) or confocal scanning interferometry (CSI), along with additional techniques available on the Profilm3D.

About this Webinar

3D surface profilers are widely used across many industries to quickly generate 3D topographic data, and optical profilometers such as the Profilm3D deliver non-contact measurements of a large number of surface parameters, such as roughness, step height, volume, and many more.

The Profilm3D provides different measurement techniques to address different types of surfaces and applications, including WLI, Phase Shift interferometry (PSI), Enhanced Roughness Mode using Green Light Interferometry, TotalFocus® and True Color imaging. Each of these measurement techniques is discussed, along with example applications.

About the Speaker

Menno Bouman - Sales and Applications Manager, KLA Instruments Filmetrics group

Menno Bouman manages the sales and applications teams for the Filmetrics group within KLA Instruments, responsible for the Western United States region. Prior to joining Filmetrics in 2013, he was a staff researcher at the University of California, Riverside, focusing on atomic layer deposition. Bouman received his Bachelor’s degree in Physics and his Master’s degree in Applied Physics from the Eindhoven University of Technology, the Netherlands.

Watch a short clip from the webinar below:

Attend the Webinar on Production Process Monitoring and You Will:

  • Learn about the Filmetrics Profilm3D optical profiler and its different optical techniques:
    • White light Interferometry (WLI)
    • Green light Interferometry (GLI), also known as Enhanced Roughness Mode
    • Phase Shift Interferometry (PSI)
    • TotalFocus infinite depth of focus
    • TrueColor imaging that combines RGB info with TotalFocus data
  • Understand which technologies are best suited to which applications

Who Should Attend

If you are interested in learning about non-contact optical metrology techniques and applications, then this webinar provides a good overview.

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