Semi-Automated Hot Embossing System - The EVG520HE from EV Group

The EVG520HE Semi-automated Hot Embossing System is designed for embossing and nanoimprinting applications. This production-proven system from EVG accepts substrates up to 200 mm and is compatible with standard semiconductor manufacturing technologies.

The hot embossing system is configured with a universal embossing chamber, high-vacuum, high temperature and high-contact force capabilities and manages the whole range of polymers and several glasses suitable for hot embossing. Together with high-aspect ratio embossing and multiple de-embossing options many processes for high quality pattern transfer and nm resolution are offered.

Features of the EVG520HE Semi-automated Hot Embossing System include:

  • For hot embossing and nanoimprinting applications of polymer substrates and spin-on polymers and glasses
  • Automated embossing process
  • EVG's proprietary separate alignment process for optically aligned embossing and imprinting
  • Pneumatic de-embossing options
  • Software controlled process execution
  • UV-NIL Option
Ask A Question

Do you have a question you'd like to ask the manufacturer of this equipment or can you provide feedback regarding your use of this equipment?

Leave your feedback
Other Equipment by this Supplier
Other Equipment