Automated Nanoimprint Lithography System - The EVG6200 Infinity from EV Group

The EVG6200 Infinity automated nanoimprint lithography system is the culmination of EV Group's new aligner-technology roadmap. A variety of stamps and substrates sizes from 75mm-to-200mm can be accommodated on the EVG6200 Infinity for nanoimprint lithography applications.

Features the EVG6200 Infinity automated NIL System

  • Nanoimprint lithography and micro contact printing
  • UV light exposure
  • Dedicated tooling for UV-NIL
  • Accommodation of both soft and hard stamps
  • Type of substrates: Si, glass, compound semiconductors
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